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Abscheidung und Charakterisierung von Aluminium-oxid-HMDS-Plasmapolymerschichten

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Author:Martin Balzer
Advisor:Andreas NeidhardtGND, S. Straack
Document Type:Diploma Thesis
Language:German
Date of Publication (online):2000/09/11
Year of first Publication:1996
Date of final exam:1998/08/03
Tag:Bedampfung
GND Keyword:Plasmapolymerisation; Vakuumbeschichten
Page Number:37 Seiten, 31 Abb., 1 Tab., 11 Lit.
Faculty:Westsächsische Hochschule Zwickau / Physikalische Technik, Informatik
Release Date:2000/09/11

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