@article{WeberHeimburgerSchondelmaieretal.2023,
  author    = {Dominik Weber and Robert Heimburger and Gianina Schondelmaier and Toni Junghans and Annika Zetzl and Dietrich R. T. Zahn and Daniel Schondelmaier},
  title     = {Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology},
  journal   = {SN Applied Sciences},
  volume    = {5},
  number    = {1},
  doi       = {10.1007/s42452-022-05219-1},
  year      = {2023},
}