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Teilcheneinfall und Schichtwachstum beim Hochratesputtern.

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Author:Andreas Neidhardt
Document Type:Doctoral Thesis
Language:German
Year of first Publication:1990
Granting Institution:Technische Hochschule Zwickau
Tag:Dissertation
Page Number:VIII, 115 S.: Abb., Anh.
Note:
Signatur 1: Q 2942
Note:
Anzahl Exemplare: 2
Faculty:Technische Hochschule Zwickau
Release Date:2018/12/19