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Year of publication
1994
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Document Type
Diploma Thesis
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Institute
Physikalische Technik, Informatik
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Language
German
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Author
Fickert, Andreas (1)
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Untersuchungen des Plasmas gepulst betriebener Dual-Magnetron-Systeme (DMS)
(1994)
Fickert, Andreas
Keine Angabe <!-- #h:dissdiplBedampfungsprozeß.doc# -->
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