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Qualification of tool to tool matching of a color image inspection system for wafer backsides
(2010)
This diploma thesis deals with the qualification of the color image inspection of a wafer backside inspection system as a means of defect detection. Currently, the color image is used to provide a quick overview and visual impression of the wafer backside. The goal of the diploma thesis is to qualify the color image inspection to comply with all requirements of tool to tool matching. As a given standard, the existing hardware design of the wafer backside inspection system can not be altered and has to be used in its current state. Potential causes of uncertainty introduced by this hardware design will be accounted for. The main focus of the diploma thesis will be the investigation of the three main factors influencing the color image inspection. These factors are the detected intensity, the contrast and the image sharpness. Their adjustability, repeatability, reproducibility and effect on the tool to tool matching are going to be quantified, necessary improvements will be formulated and the implementation of these improvements is going to be tested. Additionally, new and existing software factors influencing defect detection will be investigated with regard to their effect on the tool to tool matching. Lastly, based on the findings of the diploma thesis, a series of suggestions will be formulated. They will help to plan additional qualification steps, if necessary, and provide the basis for composing a guideline to achieve tool to tool matching for all systems in the field.
Cloud Computing has had an impact on the computer science in recent years. Instead of the traditional way, where the using and providing of hardware resources and software are inflexible, Cloud Computing represents a pool of scalable, on-demand and easily available Cloud Services. These are differentiated by infrastructure, platform or software and are provided by a Cloud Service provider. An example of a service provider is a business software provider. Due to this of business software customers are increasingly are interested in a shift to Cloud Computing. Customers want to appreciate the advantages of Cloud Computing, such as the reduction of business expenditures generally or make business more flexible. This Bachelor Thesis analyses Cloud Computing's possibilities and advantages, especially Cloud Services, to forming the basis of expanding business software providers' product portfolio. The analyses results the concept for providing existing software components as a Cloud Service, without radically altering component configuration. This is used by a number of actors types and points out the advantage of using Cloud Services in different ways. Finally, a prototype implementation analysis the technical feasibility of the concept and represents a basis for conclusion and outlook
The here presented work is about the development of an atom pair descriptor based virtual screening system. In the beginning the fundamentals are explained which are the base of the following chapters. The chemical data file formats, the term descriptor as well as the enrichment factor and the process of benchmarking is discussed. In the main part the development of the virtual screening system is explained and afterwards the results on the bcr-abl kinase target protein are interpreted. For the development of the virtual screening system the realization of the atom pair descriptor, the different similarity methods and their selection is discussed. Also the clustering and the functio-nality of the virtual screening system are explained. Afterwards the results of the bcr-abl kinase screening are discussed and the functionality of the virtual screening system is evaluated. Finally a conclusion is given where set goals and achieved outcomes are compared and an outlook for possible future projects is presented.